ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms - Assessment of suitability for use of equipment by airborne particle concentration1 Scope This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e. g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644 1. Particle sizes range from 0,1 m to equal to or larger than 5 m (given in ISO 14644 1). NOTE Where regulatory agencies impose supplementary

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Manufacturers of pumps and motors

often through one or more intervening communications processors

as the value established from this was only slightly above 4

Manufacturers and suppliers of passive components

BS 5070-3-compliant flow diagram depicts all the essential parts of a process or item of equipment which enables the analysis and calculation of physical characteristics to be undertaken

5 Test procedures

This Section of BS 1449 specifies low carbon (0

Manufacturers of field meters

nor those intended for the connection of hand-held cameras to the flash equipment synchro-cord (see ISO 519)

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With obedience and compliance to BS EN 50123-7-1